Microelectromechanical systems (MEMS) involve the use and development of micron-sized electrical devices such as microelectrodes, sensors, and actuators that are integrated into computer and smartphone chips. Fabricating such integrated MEMS devices is usually a challenging task as these devices often deviate from their original design owing to the defects introduced during their fabrication and operation. This, in turn, limits their performance. Therefore, it is crucial to identify and rectify these defects.
